| 摘要 |
PROBLEM TO BE SOLVED: To provide a micromachine having mass-producibility and few defects for high reliability, and a method of manufacturing it. SOLUTION: A carbon nanotube is manufactured by chemical vapor phase epitaxy wherein fine particles of nickel sulfide are used as a catalyst and a hydrocarbon gas is introduced at high temperatures as an electric field is applied in a specific direction. The catalyst 11 is formed into fine particles on a substrate 10 by various methods, whereby a carbon nanotube 4 of good linearity with few defects is obtained. Further, the carbon nanotube 4 is covered with a retainer 5 to obtain a beam 6. The beam is secured to ribs 3 at each or one end and a movable electrode 7 is securely attached to the mid portion of the beam and opposed to a fixed electrode 2 on the substrate 1. Thus, even if the movable electrode 7 is driven by an electrostatic attracting force upon the application of a voltage between the movable electrode 7 and the fixed electrode 2, the beam 6 will not be removed from the movable electrode 7 and the rib 3. COPYRIGHT: (C)2003,JPO
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