摘要 |
<P>PROBLEM TO BE SOLVED: To reduce the cost of products and to realize the mass production and larger area of the products. <P>SOLUTION: The micro fabrication method for a web has a mask layer forming process step (a) of forming a mask layer 20 on the web 3 under conveyance, a micro fabrication process step (c) of subjecting the mask layer 20 to the micro fabrication by a laser abrasion method, a material packing process step (d) of packing a patterning material 11 into pattern bores 23 formed in the mask layer 20 by the micro fabrication, and a mask layer peeling and recovering process step (f) of peeling the mask layer 20 from the web 3 and recovering the mask layer. <P>COPYRIGHT: (C)2003,JPO |