| 摘要 |
PURPOSE: A glass fixing method of vacuum chamber for manufacturing organic electroluminescent devices is provided to prevent defects of product by adhering tape having magnetic force to upper surface of glass and fixing the glass using magnetic force generated from magnets, thereby performing deposition process in the state that flatness of the glass is uniformly maintained. CONSTITUTION: In a method for fixing the glass(1) to the inside of vacuum chamber to deposit patterns on the surface of glass(1) that is a panel of organic electroluminescent devices, the glass fixing method of the vacuum chamber for manufacturing the organic electroluminescent devices comprises the steps of adhering a tape(2) having magnetic force to the upper surface of the glass; adhering a magnetic chuck(4) from which magnetism is generated adjacently to the upper surface of the tape(2) so that flatness of the glass(1) is uniformly maintained; separating the magnetic chuck(4) after depositing patterns on the bottom of the glass(1); and removing the tape(2) from the upper surface of the glass after separating the magnetic chuck(4), wherein a metal having magnetic force is contained in the tape(2), or a metallic film(3) having magnetic force is coated on the surface of the tape, and wherein the magnetic chuck(4) is a permanent magnet or electromagnet.
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