| 摘要 |
PROBLEM TO BE SOLVED: To provide a parting agent composition capable of effectively parting a resist film and etching residue while preventing the corrosion of metal liable to corrode, e.g. copper, excellent in product safety, treatable by biological treatment and ensuring easy waste water treatment. SOLUTION: The parting agent composition contains (a) an anticorrosive, (b) a parting agent and (c) a solvent, and the anticorrosive (a) is a heterocyclic compound having a nitrogen-containing 6-membered ring. |
