| 摘要 |
PURPOSE: A piezoelectric bimorph micro phone and a method for manufacturing the same are provided to drastically improve the sensitivity when the electrodes are appropriately connected in serial, thereby preventing the changes of the stress due to the stress. CONSTITUTION: A piezoelectric bimorph micro phone includes the steps of: depositing(S1) a pair of SiN thin films on both sides of a substrate; depositing(S2) an aluminum layer on the front surface of the substrate; depositing(S3) a piezoelectric ZnO thin film on the aluminum layer; depositing(S4) a parylene-D thin film on the ZnO thin film; etching(S5) the SiN thin film formed on the rear surface of the substrate after the SiN thin film formed on the rear surface of the substrate is patterned; depositing(S6) a ZnO thin film on the exposed aluminum layer at the rear surface of the substrate; manufacturing(S7) the bimorph structure and the rear electrode; and manufacturing(S8) the front electrode.
|
