| 发明名称 |
CARBONITRIDE COATED COMPONENT OF SEMICONDUCTOR PROCESSING EQUIPMENT AND METHOD OF MANUFACTURING THEREOF |
| 摘要 |
A corrosion resistant component of semiconductor processing equipment such as a plasma chamber includes a carbonitride containing surface and process for manufacture thereof.
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| 申请公布号 |
KR20030063486(A) |
申请公布日期 |
2003.07.28 |
| 申请号 |
KR20037008854 |
申请日期 |
2003.06.28 |
| 申请人 |
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发明人 |
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| 分类号 |
C23C14/06;H01L21/3065;B01J19/02;C23C16/44;H01J37/32 |
主分类号 |
C23C14/06 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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