| 摘要 |
PROBLEM TO BE SOLVED: To provide a fine control means which is not affected by changes in the hysteresis or drifts of a piezoelectric element due to heating when the piezoelectric element used for sample scanning of a scanning probe microscope is driven at a high speed and provide the scanning probe microscope using the same. SOLUTION: The fine control means is comprised of the piezoelectric element 101, a thermally insulating means 102 for insulating heat generated by the piezoelectric element 101, and an elastic body 104 which is deformed by displacements of the piezoelectric element 101 via the thermally insulating means 102. The scanning probe microscope is constituted in such a way as to use the fine control means. COPYRIGHT: (C)2003,JPO
|
