LEAK INSPECTION APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a leak inspection apparatus for surely inspecting leakage of the closed piping with reduced consumption of an inspection gas and better working efficiency. SOLUTION: A freezing circuit 8 is guided into a chamber 2 through an opening which is formed at the lower side of the chamber 2 having a space filled with helium. The freezing circuit 8 is transported by a lift 9 to the upper part within the chamber 2 while the freezing circuit 8 is evacuate by a vacuum pump 5 connected to the freezing circuit 8. A detector 4 which is disposed outside the freezing circuit 8 to detect presence of helium, determines leakage of the freezing circuit 8 by detecting presence of the helium. COPYRIGHT: (C)2003,JPO