| 摘要 |
PROBLEM TO BE SOLVED: To provide an electronic circuit inspection device capable of inspecting easily a disconnection in the middle of a pattern, a partial notch, or a short- circuit to an adjacent pattern, regardless of the shape of a conductive pattern which is an inspection object, for example, even in the case of a branch pattern. SOLUTION: This device is equipped with a sensor probe 20 equipped with sensor elements disposed close plurally, and having respectively an electrode having the side of at least about one-third as long as the line width of the conductive pattern which is the inspection object and an insulating layer formed on the surface of the sensor elements, supply means 201, 211, 240 for supplying the conductive pattern which is the inspection object with an alternating-current signal, and reading means 26, 220 for reading the detection field intensity of each sensor element of a sensor having the sensor probe 20 positioned and loaded on the upper part of the conductive pattern which is the inspection object. A field intensity distribution is read by loading the insulating layer on the surface of the sensor probe 20, for example, in the close state, on the conductive pattern which is the inspection object. COPYRIGHT: (C)2003,JPO
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