| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To attain observation from low power to high power with only one apparatus. <P>SOLUTION: This microscope comprises a 2D (two dimensional) electronic detection means 3 for detecting electronic images two dimensionally, a lens system 2 which is attached on a sample side ahead of the 2D electronic detection means 3 and forms the electronic images obtained from the sample S. The lens system 2 forms two types of electronic images of a diffraction image or an expanded electron microscope image by switching the intensity of the respective lens, and the 2D electronic detection means 3 detects the electron images formed by the lens system 2 in a 2D manner. <P>COPYRIGHT: (C)2003,JPO</p> |
