发明名称 SEMICONDUCTOR WAFER, METHOD FOR INSPECTING SEMICONDUCTOR WAFER AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor wafer, a method for inspecting the semiconductor wafer and a method for manufacturing the semiconductor device in which inspection and aging can be performed by a simple and low-cost technique. SOLUTION: A plurality of chip areas 20 having a plurality of signal lines 1 with the same circuit configurations are formed to be arrayed in one semiconductor wafer, and scribe lines 40 of given widths which serve as cutting seams when scribing is formed between the neighboring chip areas 20. Common signal wires 2A, 2B, etc., are provided within widths of the scribe lines 40 so as to electrically be connected in common to each of the signal lines 1 of the same kinds of the plurality of chip areas 20. COPYRIGHT: (C)2003,JPO
申请公布号 JP2003209148(A) 申请公布日期 2003.07.25
申请号 JP20020007906 申请日期 2002.01.16
申请人 SONY CORP 发明人 MIYANAGA TAKASHI
分类号 H01L21/66;H01L21/822;H01L27/04;(IPC1-7):H01L21/66 主分类号 H01L21/66
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