| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a new electron spectroscopic apparatus whose energy resolution is increased without lowering its sensitivity. <P>SOLUTION: A sample 2 is irradiated with X-rays, photoelectrons emitted from the irradiated sample 2 are decelerated by an input lens 3 so as to be guided to an electrostatic hemispherical analyzer 4, and the photoelectrons selected by the analyzer are detected by a detector 5. The input lens is composed of four-stage cylindrical electrodes DA, DB, DC, DD the electrode DC is divided into six parts, and respective electrodes E<SB>1</SB>, E<SB>2</SB>, E<SB>3</SB>, E<SB>4</SB>, E<SB>5</SB>, E<SB>6</SB>are arranged in such a way that the center of the electrode E<SB>1</SB>and the center of the electrode E<SB>2</SB>, are situated n a direction along the X-axis. +V<SB>0</SB>, -V<SB>0</SB>, -V<SB>0</SB>, +V<SB>0</SB>, +V<SB>0</SB>and -V<SB>0</SB>are applied respectively to the electrodes E<SB>1</SB>, E<SB>2</SB>, E<SB>3</SB>, E<SB>4</SB>, E<SB>5</SB>, E<SB>6</SB>. <P>COPYRIGHT: (C)2003,JPO</p> |
