| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a gas sensor that can accurately measure the gas concentration such as hydrogen gas concentration for a long term. <P>SOLUTION: A diffusion control part (19) to communicate and ambient atmosphere to a first concavity (10) is installed on a first support (7). This diffusion control part (19) is a small hole which introduces fuel gas of gas to be measured (accordingly the contained hydrogen gas) to a first electrode (3) and rate-controls the diffusion of the gas. On the other hand, a gas discharge part (21) of a vacancy to communicate the ambient atmosphere to a second concavity (11) is installed on a second support (8). Especially, the dimension of the diffusion control part (19) and gas discharge part (21) are set so that the ratio a/b of the diffusion resistance a of the diffusion control part (19) and the diffusion resistance b of the gas discharge part (21) is 2 or less. <P>COPYRIGHT: (C)2003,JPO |
