METHOD FOR OBSERVING SURFACE SHAPE BY REPLICA

摘要

PROBLEM TO BE SOLVED: To provide a method for reliably observing the surface shape of an object to be observed transferred to a replica after the surface of the object to be observed is transferred by a replica material. SOLUTION: Powder 1 of a color different from the color of a transfer surface 4 of the replica 3 is applied to the transfer surface 4 to which the surface of the object to be observed is transferred. The powder 1 on the transfer surface 4 is spread and swept until the state of distribution of the powder 1 stops visibly and substantially changing. The transfer surface 4 after the spreading and sweeping is visually observed. In the case of the detection of a trace 5 in which the powder 1 is densely collected, it is determined that defects such as cracks are present on the surface of the object to be observed. COPYRIGHT: (C)2003,JPO