| 摘要 |
PROBLEM TO BE SOLVED: To remove backlash in a rotary stage device using a normal worm gear, etc., for a drive transmission mechanism. SOLUTION: A face plate 1 is fixed on a head end of a main shaft 2. The main shaft 2 is supported on an upper surface of a housing 4 through a bearing 3. The worm gear is stored in the inside of the housing 4, and a worm wheel 5 is fixed on a rear end of the main shaft 2. A shaft 7 of a worm 6 is supported on a side surface of the housing 4 through a bearing 8, and a rear end of the shaft 7 is connected to a servo motor 9. A torsional coil spring 11 is mounted on an end surface of the worm wheel 5. One end of the torsional coil spring 11 is fixed on an end surface of the worm wheel 5, and the other end is fixed on a bottom surface of the housing 7. Rotational torque in the specified direction is constantly made to work on the main shaft 2 by previously giving specified sagging to the torsional coil spring 11. COPYRIGHT: (C)2003,JPO
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