| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspecting apparatus of a tape carrier for a semiconductor device that easily replaces or adds a filter and can be used stably for a long time. SOLUTION: The inspecting apparatus of a tape carrier for semiconductor devices has an illumination section 13 for applying light toward one surface side of a TAB tape 14, a light source body 1 for supplying light to the illumination section 13, an optical fiber 12 for connecting the light source body 11 to the illumination section 13 and for guiding light that is supplied from the light source body 11 to the illumination section 13, a filter 16 for absorbing a desired frequency component form light that is supplied form the light source body 11, and a camera 15 for photographing light through the TAB tape 14 from the other surface side of the TAB tape 14. In the inspecting apparatus, a filter holder 17 for retaining the filter 16 so that it can be exchanged freely is provided in the middle of the optical fiber 12. COPYRIGHT: (C)2003,JPO
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