THIN FILMS AND METHODS FOR THE PREPARATION THEREOF

摘要

An organosiloxane material, which exhibits both inorganic and organic bonds within a cured and at least partially cross-linked siloxane composition to give a product which has excellent strength properties and good heat-resistance. The new materials are obtained by reacting a first silane compound containing an unsaturated hydrocarbon residue, which will provide for organic cross-linking, and a second silane compound containing at least one aryl group. The new materials can be used as thin films, e.g. as dielectrics in integrated circuits.