发明名称 SEMICONDUCTOR MEMORY DEVICE WITH MINIATURIZATION IMPROVEMENT
摘要 An isolating insulation film (1) and a P type active region (2) defined by the isolating insulation film (1) are formed on a semiconductor substrate. Then, an access transistor gate electrode (3), driver transistor gate electrodes (4a, 4b), and a dummy gate electrode (20) are formed. The dummy gate electrode (20) is formed to cover part of the active region (2) within a region (8) into which an N type dopant is to be implanted to form N+ source/drain regions (9). As a result, the N+ source/drain regions (9) are not formed under the dummy gate electrode (20), and the N+ source/drain regions (9) are reduced in width. This reduces the conductance of access transistors, that is, improves a conductance ratio between the driver and access transistors.
申请公布号 US2003137011(A1) 申请公布日期 2003.07.24
申请号 US20020198961 申请日期 2002.07.22
申请人 MITSUBISHI DENKI KABUSHIKI KAISHA 发明人 MASUDA YASUICHI
分类号 H01L27/10;H01L21/8244;H01L27/11;(IPC1-7):H01L29/76 主分类号 H01L27/10
代理机构 代理人
主权项
地址