发明名称 Thermal cracking chemical vapor deposition method for synthesizing nano-carbon material
摘要 A thermal cracking chemical vapor deposition method for synthesizing a nano-carbon material is provided. The method includes steps of (a) providing a substrate, (b) spreading a catalyst on the substrate, (c) putting the substrate into a reactor, (d) introducing a carbon containing material, and (e) heating the carbon containing material, thereby the carbon containing material being cracked to provide a carbon source for forming the nano-carbon material on the substrate.
申请公布号 US2003138561(A1) 申请公布日期 2003.07.24
申请号 US20030341887 申请日期 2003.01.13
申请人 JUANG ZHEN-YU;KUO TENG-FANG;TSAI CHUEN-HORNG;LIN I-NAN 发明人 JUANG ZHEN-YU;KUO TENG-FANG;TSAI CHUEN-HORNG;LIN I-NAN
分类号 C01B31/02;C30B25/02;C30B25/18;(IPC1-7):C23C16/00 主分类号 C01B31/02
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