发明名称 |
Thermal cracking chemical vapor deposition method for synthesizing nano-carbon material |
摘要 |
A thermal cracking chemical vapor deposition method for synthesizing a nano-carbon material is provided. The method includes steps of (a) providing a substrate, (b) spreading a catalyst on the substrate, (c) putting the substrate into a reactor, (d) introducing a carbon containing material, and (e) heating the carbon containing material, thereby the carbon containing material being cracked to provide a carbon source for forming the nano-carbon material on the substrate.
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申请公布号 |
US2003138561(A1) |
申请公布日期 |
2003.07.24 |
申请号 |
US20030341887 |
申请日期 |
2003.01.13 |
申请人 |
JUANG ZHEN-YU;KUO TENG-FANG;TSAI CHUEN-HORNG;LIN I-NAN |
发明人 |
JUANG ZHEN-YU;KUO TENG-FANG;TSAI CHUEN-HORNG;LIN I-NAN |
分类号 |
C01B31/02;C30B25/02;C30B25/18;(IPC1-7):C23C16/00 |
主分类号 |
C01B31/02 |
代理机构 |
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代理人 |
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地址 |
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