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发明名称
MATERIALS AND METHODS FOR FORMING HYBRID ORGANIC-INORGANIC DIELECTRIC MATERIALS FOR INTEGRATED CIRCUIT APPLICATIONS
摘要
申请公布号
AU2003201736(A1)
申请公布日期
2003.07.24
申请号
AU20030201736
申请日期
2003.01.08
申请人
SILECS, INC.
发明人
TIINA, J. MAANINEN;JARKKO, J. PIETIKAINEN;JUHA, T. RANTALA;ARTO, L., T. MAANINEN
分类号
C07F7/08;C07F7/12;C07F7/18;H01L21/316;(IPC1-7):C07F7/02
主分类号
C07F7/08
代理机构
代理人
主权项
地址
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