Stamper, manufacturing method therefor and optical device manufactured therewith

摘要

A fine pattern of an optical device formed by the Photo-Polymer method has a groove 100, a side wall 100a of which is sloped against a surface of stamper 18. The slope angle theta of the side wall 100a satisfies the following relational expression: Tan-1 (4xhxw1-0. 2)<theta<80° where h: a depth of the groove 100; and w1: a width of a top of a projected portion formed by the side walls 100a. Burrs formed in the optical device are reduced, and thereby mass productivity of the optical device is improved.