发明名称 MICROSTRUCTURES
摘要 A method for forming a microstructures is described. The method comprises: depositing a seed material on a substrate; growing a nanotube from the seed material; depositing microstructure material on the substrate to embed the nanotube in the microstructure material; and, detaching the substrate to release the microstructure. The resulting microstructure comprises a body portion and a nanotube embedded in the body portion.
申请公布号 WO03060923(A1) 申请公布日期 2003.07.24
申请号 WO2002IB04853 申请日期 2002.11.21
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION;CROSS, GRAHAM;DESPONT, MICHEL;DUERIG, URS, T.;GENOLET, GREGOIRE;SCHLITTLER, RETO;VETTIGER, PETER 发明人 CROSS, GRAHAM;DESPONT, MICHEL;DUERIG, URS, T.;GENOLET, GREGOIRE;SCHLITTLER, RETO;VETTIGER, PETER
分类号 B81B3/00;B82B3/00;C01B31/02;G01B7/34;G01Q70/12;G01Q70/16;G11B9/00;G11C23/00;(IPC1-7):G12B21/00;G12B21/02 主分类号 B81B3/00
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