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发明名称
SYSTEM FOR MEASURING MULTI-AXIS PRESSURE GRADIENTS IN A SEMICONDUCTOR DURING A POLISHING PROCESS
摘要
申请公布号
AU2002357381(A1)
申请公布日期
2003.07.24
申请号
AU20020357381
申请日期
2002.12.23
申请人
ADVANCED MICRO DEVICES, INC.
发明人
BHARATH RANGARAJAN;STEVEN, C. AVANZINO;RAMKUMAR SUBRAMANIAN;BHANWAR SINGH
分类号
B24B37/04;B24B49/04;B24B49/10;(IPC1-7):B24B37/04
主分类号
B24B37/04
代理机构
代理人
主权项
地址
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