| 发明名称 |
Quantum well intermixing. |
| 摘要 |
A photonic integrated circuit is produced by performing quantum well intermixing of a quantum well structure, the intermixing being carried out by implanting impurities through differential masks into the circuit and annealing it. The masks are produced by diffferential density layers. |
| 申请公布号 |
ZA200205930(B) |
申请公布日期 |
2003.07.24 |
| 申请号 |
ZA20020005930 |
申请日期 |
2002.07.24 |
| 申请人 |
NTU VENTURES PTE LTD. |
发明人 |
BOON SIEW OOI;YEE LOY LAM;YUEN CHUEN CHAN;YAN ZHOU;GEOK ING NG |
| 分类号 |
G02B6/12;H01L21/18;H01S5/026;H01S5/20;H01S5/34 |
主分类号 |
G02B6/12 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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