| 摘要 |
<p>An integrated cryopump and 2 stage pulse tube refrigeration system (100) comprising a cryopump, a compressor for a pulse tube refrigerator, a pulse tube refrigerator located within the vacuum chamber of the cryopump where the hot ends of the pulse tubes (165,175) are connected to each other through a buffer volume (180), are integral to the cryopump vacuum chamber hosing, and a buffer volume (180) is connected to the hot ends (117,119) of the pulse tubes (165,175) through flow restrictors (145,150).</p> |
