发明名称 METHOD OF PREPARING VERY PURE SILICON CHLORIDE AND/OR GERMANIUM CHLORIDE
摘要 <p>The present invention relates to a method of preparing very pure silicon chloride and/or germanium chloride by reaction with a fluorinating agent. The present invention furthermore relates to a method of depositing one or more glass layers on the interior of a substrate tube of quartz glass, in which one or more reactive gases and an oxygen-containing gas are supplied to said substrate tube, as well as to a method of manufacturing optical fibres.</p>
申请公布号 WO2003059808(A1) 申请公布日期 2003.07.24
申请号 NL2002000716 申请日期 2002.11.08
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