| 摘要 |
A moving apparatus according to this invention absorbs a reaction force generated upon driving a movable portion (3) by actuators (8, 8') which has movable elements (2, 2') and stators (1, 1') by moving the left and right stators (1, 1'). The actuators (8, 8') are controlled such that the moving distance of the movable portion (3) and that of the stators (1, 1') have a predetermined relationship. With this operation, a moving apparatus which can move at high precision without transmitting vibrations to the outside in driving a stage, and an exposure apparatus using the same can be provided.
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