Tilting mirror with rapid switching time

摘要

A device for rapid optical switching includes a membrane having a reflecting surface on at least a portion of an upper surface of the membrane, first and second spacers at opposing ends of the membrane for securing the membrane to a substrate, whereby the membrane is spaced apart from the substrate, and first and second actuation electrodes positioned on the same side of the membrane and spaced a distance from the membrane so as to form a gap therebetween, whereby actuation of the actuation electrodes applies a force to the membrane to tilt the reflective portion of the membrane at an angle with respect to the substrate.