| 发明名称 |
CONTAMINATION SUPPRESSION IN CHEMICAL FLUID DEPOSITION |
| 摘要 |
Methods for depositing materials onto a substrate surface or into a porous solid are disclosed. These methods include suppressing contamination of the deposited materials.
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| 申请公布号 |
CA2471596(A1) |
申请公布日期 |
2003.07.24 |
| 申请号 |
CA20022471596 |
申请日期 |
2002.12.20 |
| 申请人 |
UNIVERSITY OF MASSACHUSETTS |
发明人 |
WATKINS, JAMES J.;CABANAS, ALBERTINA;BLACKBURN, JASON W. |
| 分类号 |
C23C16/18;C23C16/52;C23C18/08;C23C18/40;H01L21/285;(IPC1-7):H01L21/31;H01L21/44;H01L21/469 |
主分类号 |
C23C16/18 |
| 代理机构 |
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