发明名称 |
Lithographic apparatus and device manufacturing method |
摘要 |
A lithographic projection apparatus includes a conduit that supplies utilities to a movable component in a vacuum chamber such as an object table, associated motor or sensor. The conduit comprises flexible metal bellows preventing out-gassing of the conduit due to the vacuum in the vacuum chamber while allowing movement of the movable component in at least a first degree of freedom.
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申请公布号 |
US2003137643(A1) |
申请公布日期 |
2003.07.24 |
申请号 |
US20020305266 |
申请日期 |
2002.11.27 |
申请人 |
ASML NETHERLANDS B.V. |
发明人 |
JACOBS HERNES;VOSTERS PIET;HOL SVEN ANTOIN JOHAN;VAN DER SCHOOT HARMEN KLAAS;VAN DIESEN ROBERT JOHANNES PETRUS;CALLAN DAVID WILLIAM |
分类号 |
G03F7/20;H01L21/027;(IPC1-7):G03B27/42 |
主分类号 |
G03F7/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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