Exchangeable process window

摘要

A frame (11) holds a conical window (2). A radiation passage is formed in the core of a screw cylinder (12). The screw cylinder includes an external thread (7) for screwing the screw cylinder into the frame. The frame includes a complementary internal thread and an elastic ring seal (3) located between the window and screw cylinder. The window is conically tapered away from the screw cylinder. An Independent claim is also included for an optical process window system.