METHOD AND APPARATUS FOR PROCESSING PROCESSED ARTICLE

摘要

PURPOSE: An apparatus for processing a processed article is provided to minimize the influence of vapor upon exterior circumstances and the usage of chemicals by blocking the exhaustion of the vapor and by collecting and reusing the vapor. CONSTITUTION: The chemicals(300) are heated and vaporized. The processed article is processed by using the vapor(302). The vapor is liquidized to be the chemical. The chemical is collected. The chemical is heated to a temperature scope from 80 to 120 deg.C. The liquidization is made by cooling the vapor.