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发明名称
Method of manufacturing high purity cobalt sputter targets having a low magnetic permeability
摘要
申请公布号
EP1096027(B1)
申请公布日期
2003.07.23
申请号
EP20000123669
申请日期
2000.10.30
申请人
PRAXAIR S.T. TECHNOLOGY, INC.
发明人
SNOWMAN, ALFRED;KOENIGSMANN, HOLGER;DESERT, ANDRE;HUNT, THOMAS J.
分类号
C22F1/10;C23C14/34;H01F41/18;H01L21/203;(IPC1-7):C22C19/07
主分类号
C22F1/10
代理机构
代理人
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