发明名称 |
MULTI-CHANNEL LONG WAVELENGTH VCSEL ARRAY AND FABRICATING METHOD THEREOF |
摘要 |
PURPOSE: A multi-channel long wavelength VCSEL array and a fabricating method thereof are provided to form constantly an interval of a laser oscillation wavelength by controlling a resonant interval. CONSTITUTION: A multi-channel long wavelength VCSEL array includes a semiconductor substrate(10), a bottom mirror(20), an active region(30), a current limit layer(40), a superlattice control layer(50), and a top mirror(60). The bottom mirror is formed on the semiconductor substrate. The active region is formed on the bottom mirror. The current limit layer is formed on the active region in order to limit efficiently the current and enhance the efficiency of the heat transfer. The superlattice control layer is formed on the current limit layer in order to control an interval of laser oscillation wavelength. The top mirror is formed on the superlattice control layer.
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申请公布号 |
KR20030062110(A) |
申请公布日期 |
2003.07.23 |
申请号 |
KR20020002534 |
申请日期 |
2002.01.16 |
申请人 |
ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE |
发明人 |
HAN, WON SEOK;JU, YEONG GU;KIM, JONG HUI;KWON, O GYUN;SHIN, JAE HEON;YOO, BYEONG SU |
分类号 |
H01S5/183;(IPC1-7):H01S5/183 |
主分类号 |
H01S5/183 |
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主权项 |
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地址 |
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