发明名称 |
Method and apparatus for determining dynamic response of microstructure by using pulsed broad bandwidth ultrasonic transducer as BAW hammer |
摘要 |
A method and/or an apparatus for determining the dynamic response of a microstructure is disclosed. A piezocomposite ultrasonic transducer device formed of a piezoelectric material and a polymer material around said piezoelectric ceramic material is used to provide a pulsed bulk acoustic wave having a bandwidth of at least 20% to excite a microstructure. The microstructure is attached onto the transducer, and the pulsed bulk acoustic wave generated through the transducer in response to a pulse voltage excites the microstructure to vibrate. Meanwhile, the dynamic response of the microstructure can be monitored by a laser Doppler vibrometer, and shown by an oscilloscope.
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申请公布号 |
US6595058(B2) |
申请公布日期 |
2003.07.22 |
申请号 |
US20010884273 |
申请日期 |
2001.06.19 |
申请人 |
COMPUTED ULTRASOUND GLOBAL INC. |
发明人 |
LAI WEN PIN;FANG WEILEUN |
分类号 |
B81C99/00;G01N3/02;G01N3/06;G01N3/32;(IPC1-7):G01N29/00;H01L41/00;G01M7/00 |
主分类号 |
B81C99/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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