发明名称 |
Flat panel display comprising an array of nanotubes |
摘要 |
A system and method for manufacturing carbon nanotubes as functional elements of MEMS devices. The method of the present invention comprises the steps of preparing a MEMS substrate for synthesis of a carbon nanotube. A nanosize hole or catalyst retaining structure is fabricated on the MEMS substrate in which a nanotube catalyst is deposited. A nanotube is then synthesized within the nanosize hole.
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申请公布号 |
US6597090(B1) |
申请公布日期 |
2003.07.22 |
申请号 |
US20000669212 |
申请日期 |
2000.09.25 |
申请人 |
XIDEX CORPORATION |
发明人 |
MANCEVSKI VLADIMIR |
分类号 |
G01Q60/24;G01Q70/12;G01Q70/16;G11C23/00;(IPC1-7):H01J1/304 |
主分类号 |
G01Q60/24 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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