| 摘要 |
PROBLEM TO BE SOLVED: To provide an inkjet recording head, a method of manufacturing the same and an inkjet recorder capable of improving the manufacturing efficiency and suppressing the cost. SOLUTION: There is disclosed the inkjet recording head that comprises a fluid passage forming substrate 10 having a pressurizing chamber 12 which communicates with a nozzle opening and is compartmented thereon, and a piezoelectric element 300 which is constituted of a lower electrode 60 provided to one face side of the fluid passage forming substrate 10 with a diaphragm therebetween, a piezoelectric element layer 70, and an upper electrode 80. The inkjet recording head is equipped with a sealing substrate 30 having a piezoelectric element holding section 31 which is bonded to the fluid passage forming substrate 10 at the side of the piezoelectric element 300 and seals a space in a condition that the space in an extent of not blocking an action of the piezoelectric element 300 is attained. The sealing substrate 30 has a through-hole 32 penetrating the substrate in the depth direction and the through-hole 32 is constituted of a wet etching section 32a formed by anisotropic wet etching and a dry etching section 32b which communicates with the wet etching section 32a and is formed by dry etching. COPYRIGHT: (C)2003,JPO
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