Carbon fiber and copper support for physical vapor deposition target assembly and method of forming

摘要

The invention includes a method of forming an assembly of a physical vapor deposition target and support. A physical vapor deposition target is provided. The physical vapor deposition target has a coefficient of thermal expansion of less than 10x10-6K-1. The physical vapor deposition target is joined to a support. The support comprises a thermal coefficient of expansion of less than 11x10-6K-1. The invention also includes an assembly comprising a physical vapor deposition target and a support joined to the physical vapor deposition target. The support comprises carbon fibers and copper.