| 摘要 |
<P>PROBLEM TO BE SOLVED: To discriminate (detect) the life of a polishing pad without lowering relative rigidity of a groove required for polishing. <P>SOLUTION: This polishing pad 11 provided in a position opposite to a surface plate for placing a material to be polished, has a service life discriminating groove 13 or hole shallower than the depth of a desired polishing groove 12 or hole required for polishing and the polishing groove. <P>COPYRIGHT: (C)2003,JPO |
