摘要 |
PROBLEM TO BE SOLVED: To produce a large area and high quality group III nitride crystal. SOLUTION: Terminals 21, 22 are arranged at the tip end of a sensor 20 in a spatially separated state. The height of a liquid surface (gas-liquid interface) is kept constant by stopping or moving upward the bottom plate 17 of a crystal growth vessel 18 by the presence or absence of the electrical continuity between the terminals 21, 22 arranged at the tip end of the sensor 20. COPYRIGHT: (C)2003,JPO
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