发明名称 |
Electrostatically charged microstructures |
摘要 |
A process and apparatus for injecting electrostatic charges into opposing elements of MEMS structures to produce repulsing forces between the elements. These forces tend to produce controlled spacing between components to prevent sticking and to provide friction-free relative movement.
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申请公布号 |
US6597048(B1) |
申请公布日期 |
2003.07.22 |
申请号 |
US20010828991 |
申请日期 |
2001.04.10 |
申请人 |
CORNELL RESEARCH FOUNDATION |
发明人 |
KAN EDWIN C. |
分类号 |
B81B3/00;(IPC1-7):H01L29/84;H01L29/86 |
主分类号 |
B81B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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