| 摘要 |
PROBLEM TO BE SOLVED: To deposit a transparent conductive film keeping film uniformity in the film deposition and having excellent quality of film thickness uniformity, transparency and resistance. SOLUTION: In the method for depositing the transparent conductive thin film on the surface of a substrate by setting the substrate on a substrate holding part provided with a heater and spraying a raw material solution toward the substrate heated by the heater from a nozzle, the transparent conductive film keeping the film uniformity in the film forming and having excellent qualities of film thickness uniformity, transparency, resistance, and the like is formed by uniformly keeping the temperature distribution on the surface of the substrate set on the substrate holding part. COPYRIGHT: (C)2003,JPO
|
