SEMICONDUCTOR ACCELEROMETER AND METHOD OF MANUFACTURING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a semiconductor accelerometer which is suitable for miniaturization and to provide a method of manufacturing the semiconductor accelerometer.

SOLUTION: The semiconductor accelerometer is provided with a frame part 1 which is composed of a semiconductor substrate and has an opening 6; a plummet part 2 which is arranged inside the opening 6 in the frame part 1; and a beam part 3 which connects the upper part of the part 2 to the frame part 1 so as to be cantilever-supported. A trench part 7a which is lower by one step is formed in the upper part of the part 2 with leaving the inside of the frame part 1 supported by the beam part 3, and a platelike upper stopper 4a is bonded to the upper part of the frame part 1 so as to cover a part in the upper part of the part 2.

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