| 摘要 |
PROBLEM TO BE SOLVED: To solve a problem that energy density attenuates gradually due to aberration of lens at the end part of a linear, rectangular, or planar laser light formed through an optical system on an irradiation plane or the vicinity thereof, and since energy density is not sufficient but attenuating gradually in such a region (attenuating region) as compared with a region having a high uniformity of energy density, an object being irradiated cannot be annealed uniformly. SOLUTION: Laser light emitted from each of a plurality of lasers is split and laser lights including at least one laser light oscillated from a different laser and having a different energy distribution are multiplexed or laser lights including at least one laser light having a different energy distribution are selected and passed through convex lenses disposed obliquely to the traveling direction of respective laser lights before being multiplexed thus forming a laser light exhibiting excellent uniformity of energy distribution. COPYRIGHT: (C)2003,JPO
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