| 摘要 |
<P>PROBLEM TO BE SOLVED: To readily and accurately inspect the vibration of a piezoelectric actuator. <P>SOLUTION: The vibration locus at a piezoelectric actuator in normal action drive of the target of drive (hereinafter, referred to as 'normal vibration locus') is measured in advance. Next, the vibration locus at driving of the piezoelectric actuator, which is the target of inspection driving the target of drive is measured. Then, if this vibration locus lies outside of a certain range centered around the normal vibration locus, the action of the piezoelectric actuator which is the target of inspection is considered defective. <P>COPYRIGHT: (C)2003,JPO |
