摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser beam irradiation method, in which the laser energy is effectively absorbed into a fuse layer to superheat the fused layer, thereby, the fused layer can be broken away completely. <P>SOLUTION: The laser beam 100 is irradiated on the Cu fuse layer 1, in the direction intersecting with the longitudinal direction of the Cu fused layer 1, thereby, the energy of the laser beam is not dispersed, the laser beam is continually irradiated at the same position, thus the fuse layer 1 can be heated effectively. <P>COPYRIGHT: (C)2003,JPO</p> |