| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate processing device having high flexibility of layout. SOLUTION: Related to an interface position IP1, that gives/receives a substrate W among a plurality of transfer robots 30, a substrate-holding part 51 is made movable by an operation of an air cylinder 53 within a range, corresponding to the size of other processing units arranged in a laminate. Since a movable range can be varied by adjusting length of the air cylinder 53, restriction in the size of the arranged processing unit is reduced. Further, since a telescopic range of an arm 40 can be made minimum, the structure of the transfer robot 30 can be simplified and uniformalized. Since an occupied area also becomes small, the device footprint is reduced. COPYRIGHT: (C)2003,JPO |
