| 摘要 |
PROBLEM TO BE SOLVED: To provide a cleaning equipment of dicing machine having a cleaning nozzle exhibiting excellent cleaning power and mixing cleaning water and air well, and a cleaning method in which contaminants are removed effectively from a work during and after machining. SOLUTION: In the cleaning equipment 40 of a dicing machine 10, the cleaning nozzle 41 is a mixing nozzle of water and air. The mixing nozzle has a plurality of air channels 41B, 41B,... formed on a circle centering a water channel 41A. The plurality of air channels 41B, 41B,... join the water channel 41A in the vicinity of the forward end of the mixing nozzle to form a jet opening 41C enlarging in trumpet-shape. Since water particles are mixed finely and uniformly, effective cleaning can be carried out without using high pressure cleaning water and cost increase can be suppressed. COPYRIGHT: (C)2003,JPO |
