发明名称 METHOD OF MANUFACTURING STAMPER FOR INFORMATION MEDIUM AND APPARATUS FOR MANUFACTURING STAMPER FOR INFORMATION MEDIUM
摘要 PROBLEM TO BE SOLVED: To provide a method of manufacturing a stamper for information media which permits sure and easy formation of guide grooves of a narrow pitch without entailing a steep rise of a manufacturing cost. SOLUTION: The method comprises forming a light absorption layer 22 containing a beam absorbing material to absorb a laser beam L on a glass base material 21, forming a photoresist layer 23 on the layer 22, irradiating the photoresist layer 23 with the laser beam L to form a latent image, then developing the photoresist layer to make a master photoresist original board 2 on which a rugged pattern is formed, forming a stamper forming material on the rugged pattern forming surface of the board 2, peeling the base material 21 of the board 2 and peeling the layer 22 together with the photoresist layer 23 by using a strong alkaline solution. COPYRIGHT: (C)2003,JPO
申请公布号 JP2003203397(A) 申请公布日期 2003.07.18
申请号 JP20020320689 申请日期 2002.11.05
申请人 TDK CORP 发明人 KOYAKE HISASHI;TAKAHATA HIROAKI;UTSUNOMIYA HAJIME
分类号 G11B7/26;(IPC1-7):G11B7/26 主分类号 G11B7/26
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