| 摘要 |
PROBLEM TO BE SOLVED: To provide an electron beam device capable of reducing shot noise of an electron beam, capable of increasing a beam current, capable of forming a molding beam by only two-stage lenses, and operable with high stability. SOLUTION: This electron beam device detects a secondary electron emitted from a sample surface by irradiating a sample with the electron beam emitted from an electron gun. The electron gun 11 is a thermoelectron emitting electron gun. A molding opening 13 and a NA opening 16 are arranged in front of the thermoelectron emitting electron gun 11. An image of the molding opening 13 by the electron beam C emitted from the thermoelectron emitting electron gun 11 is formed on the sample surface only by the two-stage lenses 17 and 20. COPYRIGHT: (C)2003,JPO |
